The effects of cluster size-dependent aggregation on thin film formation

The early stages of thin film formation by thermal atom deposition are modeled by a system of kinetic rate equations which describe atomic clustering phenomena. Specifically, a set of discrete kinetic rate equations, used to model small atomic clusters, is coupled to a set of kinetic moment equations which model large atomic clusters with a continuum description. Cluster growth and dissociation processes are assumed to occur via single-atom transitions. Growth behavior is investigated as a function of cluster size, x, with an aggregation parameter w ( x ) = Wo xr for 0 <~ r < 1. Results from this statistical approach illustrate how size-dependent aggregation influences the cluster size distribution during the early stages of nucleation and growth.